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UNI-6131 Reflow Oven for 12-inch Wafers
UNI-6131 Compact Reflow Oven for 12-inch Wafers | C4 Bump, Low Oxygen, Up to 400°C
The UNI-6131 is a compact reflow oven designed for 12-inch wafers (310 mm conveyor width).
Despite its sub-2-meter footprint, its 6 heating zones + cooling configuration enables thermal profile reproducibility equivalent to mass production reflow lines.
It supports low oxygen environments and high-temperature processing up to 400°C, making it suitable for a wide range of applications—from C4 bump formation to prototyping, process development, and thermal evaluation.
This high-performance system challenges the conventional belief that compact systems cannot achieve production-level reproducibility.
Basic specifications
| Number of zones | 6 heating zones / 1 cooling zone |
| Heating method | Upper and lower hot air + far infrared heating method |
| Maximum set temperature | Top 350℃ / Bottom 350℃ |
| Board effective width | 50～310mm |
| Conveying method (selectable) | Pin chain conveying / Mesh conveying |
| Conveying speed | 0.1～0.5m/min |
| Part effective height | Top surface 10mm / Bottom surface 10mm |
| Oxygen concentration meter | Standard equipment |
| Supported languages | Japanese, English, Chinese, Korean |
| PC outlet | 1 piece (100V) |
| PCB mounting space (pin chain transport) | 4mm |
| Pass line | 900±20mm |
| Input power | AC200V 3φ 15kVA 44A (Peak power suppression mode) |
| Stable power consumption | Approximately 5kW/h |
| Equipment dimensions * (Numbers in parentheses indicate dimensions when using mesh conveying) | L1,990×D1,320×H1,410mm |
| Equipment weight | 800kg |
Option
| Automatic width adjustment mechanism |
| Overheating Prevention Device |
| Substrate Drop Sensor |
| Simple maintenance-type flux recovery |
| UPS (Uninterruptible Power Supply) |
| High temperature compatible (maximum setting temperature 400℃) |
| Oxygen Concentration Controller |
| N2 All-Zone Supply |
| Oxygen Concentration All-Zone Sampling |
| Low oxygen concentration specification (100 ppm or less) |
| Inlet/outlet conveyor extension |
| Circulation fan stop detection |
| Hood interlock |
| Reflow checker (profile measurement unit) |
| Various conveyors (conveyor, cooling conveyor, loader, unloader) |
| Various Customization Options Available |
In addition to the specifications and options listed, we can also customize the product to suit your application and process conditions.
Please feel free to contact us regarding special specifications and individual requirements. You can also download a PDF catalog summarizing the detailed specifications of UNI-6131 from the link below.
If it’s difficult to make a decision based solely on the specifications, we will propose the most suitable heating process without being limited by the listed specifications. Please feel free to contact us using the form below.